I'd nominate Mary Hartman, Mary Hartman. I have no idea what its viewership was, but it's gained a cult following and it was certainly one of the odder TV series of the 1970s.
From the list of nominees, and using cultural impact+quality as a formula, I'd go with:
MASH
All in the Family
The Jeffersons
Good Times
Soap
The Mary Tyler Moore Show
(and Mary Hartman, Mary Hartman)
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